Micro and Nano-technologies need precision machines that can produce motion accuracy down to micro/nano-meter range. At the same time, these machines have to operate at high speeds to yield high productivity. Such an increasingly tight control performance requirement puts a significant challenge to control community and forces control engineers to look beyond traditional linear control theory for more advanced nonlinear controllers. This research is to present an advanced nonlinear adaptive robust control approach to achieve micro/nanometer level positioning accuracy for micro/nano-manipulation type applications. In addition, the proposed control strategy is implemented on a commercial linear motor drive system with a position measurement resolution of 20 nanometers by an external laser interferometer. Experimental results for both long-range high-speed/high-acceleration motions and short-range slow motions are presented to demonstrate the precision motion that can be achieved by the proposed method and various practical issues that remain to be solved. It is found that for motions with a maximum speed of 2 m/sec and maximum acceleration of 45 m/sec2, the steady state position tracking error is within the linear encoder resolution of 0.5 μm when the system comes to a stop and within 5 μm during the 2 m/sec constant speed period. Furthermore, the maximal position tracking during the entire motion is mostly within 20μm. For slow motions with a maximal speed of only 0.0002m/sec, the steady state position tracking error with the external laser interferometer position measurement is mostly within 0.1 μm when the system comes to a stop and within 0.2 μm during the constant low speed period, and the maximal position tracking during the entire motion is within 2μm.
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2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
January 10–13, 2007
Sanya, Hainan, China
Conference Sponsors:
- Nanotechnology Institute
ISBN:
0-7918-4265-7
PROCEEDINGS PAPER
Precision Motion Control of Linear Motor Drive Systems for Micro/Nano-Positioning
Bin Yao,
Bin Yao
Zhejiang University, Hangzhou, China; Purdue University, West Lafayette, IN
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Chuxiong Hu,
Chuxiong Hu
Zhejiang University, Hangzhou, China
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Qingfeng Wang
Qingfeng Wang
Zhejiang University, Hangzhou, China
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Bin Yao
Zhejiang University, Hangzhou, China; Purdue University, West Lafayette, IN
Yun Hong
Purdue University, West Lafayette, IN
Chuxiong Hu
Zhejiang University, Hangzhou, China
Qingfeng Wang
Zhejiang University, Hangzhou, China
Paper No:
MNC2007-21310, pp. 1605-1614; 10 pages
Published Online:
June 8, 2009
Citation
Yao, B, Hong, Y, Hu, C, & Wang, Q. "Precision Motion Control of Linear Motor Drive Systems for Micro/Nano-Positioning." Proceedings of the 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems. First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B. Sanya, Hainan, China. January 10–13, 2007. pp. 1605-1614. ASME. https://doi.org/10.1115/MNC2007-21310
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