A precision compliant parallel-structure positioner is presented in this paper, which is dually driven by six piezoelectric motors and six piezoelectric ceramics respectively. This compliant system has a load capacity higher than 2 kg because the parallel mechanism is adopted as the main architecture. This system also can provide larger workspace and higher accuracy simultaneously compared with the conventional compliant positioner systems, because it perfectly integrates two kinds of piezoelectric actuators in one parallel system. The upper platform has the stroke of 10 mm in three linear motion directions and of 6 arc-degrees in three angle motion directions respectively for the adoption of piezoelectric motors as the large motion range actuators. The positioning resolution and repeatability of the upper platform is nanometer scale for the adoption of piezoelectric ceramics as the high precision actuators.
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2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
January 10–13, 2007
Sanya, Hainan, China
Conference Sponsors:
- Nanotechnology Institute
ISBN:
0-7918-4265-7
PROCEEDINGS PAPER
A 6-DOF Compliant Joints-Based Precision Parallel Positioner System Driven by Dual Piezoelectric Actuators
Wei Dong,
Wei Dong
Harbin Institute of Technology, Harbin, China
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Zhijiang Du,
Zhijiang Du
Harbin Institute of Technology, Harbin, China
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Lining Sun
Lining Sun
Harbin Institute of Technology, Harbin, China
Search for other works by this author on:
Wei Dong
Harbin Institute of Technology, Harbin, China
Zhijiang Du
Harbin Institute of Technology, Harbin, China
Lining Sun
Harbin Institute of Technology, Harbin, China
Paper No:
MNC2007-21111, pp. 1585-1590; 6 pages
Published Online:
June 8, 2009
Citation
Dong, W, Du, Z, & Sun, L. "A 6-DOF Compliant Joints-Based Precision Parallel Positioner System Driven by Dual Piezoelectric Actuators." Proceedings of the 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems. First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B. Sanya, Hainan, China. January 10–13, 2007. pp. 1585-1590. ASME. https://doi.org/10.1115/MNC2007-21111
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