Several Key Technologies to Improve Silicon Microgyro Performance

Silicon micromechanical gyroscope is an extraordinarily important micro inertial sensor, which has characteristics of little size, low cost and batch integrated production with huge market. But it now belongs to low or middle level precision angular rate sensor, so it is becoming a key problem to update this sensitivity to high level. This paper presents several key technologies to improve silicon microgyro performance from the view of micro-electro-mechanical working principle and minor signal detection of microgyro. The simulation and circuit design are well done, which results testify that these improved technologies have certain academic and practical value to update present low or middle level precision angular rate sensor.