Analysis and Design of a Three-Limb Six Degree-of-Freedom Parallel Micromanipulator With Flexure Hinges

A novel three-limb six degree-of-freedom (DOF) parallel micromanipulator with flexure hinges driven by piezoelectric actuators is presented. Its uniqueness lies in three inextensible limbs with specified flexure hinges and driving its input motions from a monolithic base plate that consists of three 2-DOF compliant mechanisms, unlike of the most six-limb parallel manipulators. The manipulator is very compact and its structure is simple. The kinematic problem of the manipulator is solved by using the kinematic influence coefficient theory. As a result, the velocities of the movable platform, the limbs and the flexure hinges are derived. The stiffness model of the micromanipulator is determined considering the elastic deformations of the flexure hinges according to the virtue work principle. The design targets and the primary design principles of the flexure hinges are discussed and the precision position controller modules are used to control the micromanipulator. At last the basic experiment results are presented.