The surface quality is always the crucial element of machined quality in precision ultra-precision metal cutting. A new concept that the surface integrity should include the edge quality of parts is put forward In this paper, the weight value of a series of characteristic parameters of surface integrity are calculated with using analytic hierarchy process, three basic methods of evaluating surface integrity are presented, and the comprehensive evaluation system has been formed which will theoretically play a great important role on rapid development in the precision machining.

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