Micro milling technology is used in the manufacturing of the inertial MEMS components with 3D micro structures. Firstly, a 3-axis micro milling machine was developed. The positioning accuracy of all the 3 axis is better than 0.25 μm and the highest spindle speed is 160,000RPM. Then, using this machine, the optimal cutting parameters are studied and the components are successfully manufactured. Finally, to ensure the stable performance of the components, laser cofocus microscope and a new method called micro-bridge method is introduced to estimate the roughness, elastic modulus and residual stress of the micro milled thin-walled structures in the inertial MEMS components and this is a good try to evaluate the surface quality produced by micro milled method.
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2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
January 10–13, 2007
Sanya, Hainan, China
Conference Sponsors:
- Nanotechnology Institute
ISBN:
0-7918-4265-7
PROCEEDINGS PAPER
Study on the Micro Milling Process of the Inertial MEMS Components
Bo Wang,
Bo Wang
Harbin Institute of Technology, Harbin, China
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Yan Zhao,
Yan Zhao
Harbin Institute of Technology, Harbin, China
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Ying Chun Liang
Ying Chun Liang
Harbin Institute of Technology, Harbin, China
Search for other works by this author on:
Bo Wang
Harbin Institute of Technology, Harbin, China
Yan Zhao
Harbin Institute of Technology, Harbin, China
Ying Chun Liang
Harbin Institute of Technology, Harbin, China
Paper No:
MNC2007-21469, pp. 1497-1501; 5 pages
Published Online:
June 8, 2009
Citation
Wang, B, Zhao, Y, & Liang, YC. "Study on the Micro Milling Process of the Inertial MEMS Components." Proceedings of the 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems. First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B. Sanya, Hainan, China. January 10–13, 2007. pp. 1497-1501. ASME. https://doi.org/10.1115/MNC2007-21469
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