AFM anodic oxidation has been an effective method for fabricating nanostructures. It has been applied in the fundamental research of nanoelectronics. Actually, AFM anodic oxidation is a chemical reaction process influenced by co-effects of many factors. Effects of synthesis roles of all factors on dimensions of oxide nanostructures and machining efficiency are major issues for the combination of AFM anodic oxidation technique and conventional micromachining techniques to fabricate electronics. Therefore, to fabricate oxide nanostructure effectively, orthogonal test was employed to study effects of three factors: bias voltage, machining velocity (or pulse interval) and the cantilever deflection on dimensions of nanostructures. Results showed that cantilever deflection had a significant effect on dot dimensions and had little effect on line dimensions. Based on optimization of nanostructure dimensions and machining efficiency, the optimal machining parameters (bias voltage, machining velocity or pulse interval and the cantilever deflection) on the surface of N-Si (111) were achieved under the conditions of humidity of 54% and at temperature of 23° C. Using the optimal machining parameters, regular nanostructures: lattice, annulus and complex Chinese words, were fabricated based on a novel AFM-based nanomachining system integrated a precision stage. The AFM tip was still and the precision stage moved the sample. The shortcoming of low repeatability positioning accuracy of AFM Piezo scanner during machining was eliminated. A larger machining scale with high accuracy can be realized on this system by the dot array-style fabricating method and the vector-style fabricating method.

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