Based on the basic thermal conductivity theory and the fact of micro electro discharge machining (micro-EDM), a finite element analysis model of micro-EDM is proposed. Through finite element analysis software ANSYS, the temperature field distribution of the single pulse discharge is simulated under the different heat source condition. It can be seen from the results that the shape of discharge crater is similar to that of molten zone of the temperature distribution. The surface roughness and material removed rate of single pulse discharge are calculated and analyzed by the numeric simulation results.

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