Electrochemical machining (ECM) is considered an advanced and promising technique due to several special advantages, such as non-contact machining without cutting force, no tool wear and heat-affected layer, etc. Base on the experimental results of micro-ECM, the influence of predominant process parameters, i.e. electrolyte concentration, pulse duration, period and voltage amplitude of power supply, on machining accuracy were investigated and discussed. Experimental showed that lower voltage amplitude and shorter pulse duration in micro-ECM process could produce more accurate micro structure shape. Using the self-developed experimental system, the micro tool-electrode and the complex micro-structures were sequentially machined. Upon the application of ultrashort voltage pulses, the letters with 20μm in line width were fabricated stably by the W tool electrode with 10μm diameter.
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2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
January 10–13, 2007
Sanya, Hainan, China
Conference Sponsors:
- Nanotechnology Institute
ISBN:
0-7918-4265-7
PROCEEDINGS PAPER
Electrochemical Machining of Micro-Structures With Nanosecond Pulses Available to Purchase
Zhaoyang Zhang,
Zhaoyang Zhang
Nanjing University of Aeronautics and Astronautics, Nanjing, China
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Di Zhu,
Di Zhu
Nanjing University of Aeronautics and Astronautics, Nanjing, China
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Ningsong Qu,
Ningsong Qu
Nanjing University of Aeronautics and Astronautics, Nanjing, China
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Kun Wang
Kun Wang
Nanjing University of Aeronautics and Astronautics, Nanjing, China
Search for other works by this author on:
Zhaoyang Zhang
Nanjing University of Aeronautics and Astronautics, Nanjing, China
Di Zhu
Nanjing University of Aeronautics and Astronautics, Nanjing, China
Ningsong Qu
Nanjing University of Aeronautics and Astronautics, Nanjing, China
Kun Wang
Nanjing University of Aeronautics and Astronautics, Nanjing, China
Paper No:
MNC2007-21127, pp. 1249-1253; 5 pages
Published Online:
June 8, 2009
Citation
Zhang, Z, Zhu, D, Qu, N, & Wang, K. "Electrochemical Machining of Micro-Structures With Nanosecond Pulses." Proceedings of the 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems. First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B. Sanya, Hainan, China. January 10–13, 2007. pp. 1249-1253. ASME. https://doi.org/10.1115/MNC2007-21127
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