A mechanical micro-scratching system based on Atomic Force Microscope (AFM) and three-dimensional high precision stage was built up. In the machining process with diamond tip, the process of depth controlling was determined by the relation between the loading movement of the stage and the tip penetration depth. By theoretical analysis of loading process with diamond tip, a mathematical model correlated loading movement and the penetration depth was founded, and the loading efficiency formula of elastic tip was also acquired. Verified by experiments, such equations reflected the indenting process of the system and provided theoretical basis on optimizing the penetration depth control arithmetic.

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