Metal microstructures with high-aspect-ratio and complex features have become a real challenge for the microfabrication field. A novel metal micro-parts fabrication technology is presented in this paper. The anode which also serves as a mask is patterned by UV lithography, and used to confine the region of electrodeposition. With the increasing of the thickness of electrodeposition, the mask is detached from the substrate periodically. 3-Dimensional microstructures with limitless aspect ratio can be fabricated by this technology in principle. Immersion tests show that pyrophosphate bath is more appropriate for this technology than acid sulfate bath. Cell voltage is employed to monitor the electro forming process for it provides some process information such as flash deposition, shorting occurrence, et al. Two types of movement between the mask and the cathode have been carried out on the self-developed equipment to demonstrate its feasibility. Micro bars with vertical sidewall and micro structures with slanting profile have been produced.
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2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
January 10–13, 2007
Sanya, Hainan, China
Conference Sponsors:
- Nanotechnology Institute
ISBN:
0-7918-4265-7
PROCEEDINGS PAPER
Fundamental Research on Micro Electroforming of Metal Microstructures by Using Shielded Anode
Yong-Bin Zeng,
Yong-Bin Zeng
Nanjing University of Aeronautics and Astronautics, Nanjing, China
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Di Zhu,
Di Zhu
Nanjing University of Aeronautics and Astronautics, Nanjing, China
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Ning-Song Qu,
Ning-Song Qu
Nanjing University of Aeronautics and Astronautics, Nanjing, China
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Yang-Yang Hu
Yang-Yang Hu
Nanjing University of Aeronautics and Astronautics, Nanjing, China
Search for other works by this author on:
Yong-Bin Zeng
Nanjing University of Aeronautics and Astronautics, Nanjing, China
Di Zhu
Nanjing University of Aeronautics and Astronautics, Nanjing, China
Ning-Song Qu
Nanjing University of Aeronautics and Astronautics, Nanjing, China
Yang-Yang Hu
Nanjing University of Aeronautics and Astronautics, Nanjing, China
Paper No:
MNC2007-21094, pp. 1217-1222; 6 pages
Published Online:
June 8, 2009
Citation
Zeng, Y, Zhu, D, Qu, N, & Hu, Y. "Fundamental Research on Micro Electroforming of Metal Microstructures by Using Shielded Anode." Proceedings of the 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems. First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B. Sanya, Hainan, China. January 10–13, 2007. pp. 1217-1222. ASME. https://doi.org/10.1115/MNC2007-21094
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