For a sub-micro ultra-precision turning machine using airsprings as vibration isolation elements, a 5 FOG mathematical model is established, activation f acted on the machine bed is as the input, the output are vertical displacement y1, oscillating φ1, ψ1 around the horizontal axle x and z of the machine bed, vertical displacement y2 of the main spindle box, and vertical displacement y3 of the slider. The equations for vibration system of 5 FOG are solved. The results indicate, when actuation force f ≠ 0, the outputs of all 5 FOG are increasing with the increasing of f. when activation f = 0, the outputs of all 5 FOG tend to zero. Assuming f include the vibration of machine base and an external force, when external force is equal to that of the vibration of machine base, then f = 0. The vibration of 5 FOG can be effectively isolated, so electromagnetic actuators as an external force, also as active vibration isolation elements can be used in the isolation system. Three electro-magnetic actuators arranging as triangle act as an external force, the quantity is equal to that of the base vibration, and the phase reverse. In fact ultra-precision turning machine is a complicated mechanism system and in the machining process, the headstock and horizontal-slider are in the movement, that is to say, the center of mass of the ultra-precision machine is changeable. Impossible is f = 0 for a practical control. In order to get a effective vibration isolation, fuzzy controller is used. The synthetic experiments have been done for the 5 FOG vibration system of the ultra-precision turning machine. The result of three actuations experiment that has been done in y direction indicates that the vibration of y direction, and oscillating φ1, ψ2 around the horizontal axle x and z of the machine bed are to be controlled. A work-piece of aluminum alloy has been machined using the sub-micro ultra-precision turning machine with the active vibration isolation elements, and without the active vibration isolation elements, AFM microscope graphs show the surface roughness of the work-piece machined by the former better as by the latter.
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2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
January 10–13, 2007
Sanya, Hainan, China
Conference Sponsors:
- Nanotechnology Institute
ISBN:
0-7918-4265-7
PROCEEDINGS PAPER
Vibration Control System for a Sub-Micro Ultra-Precision Turning Machine
Yuxian Gai,
Yuxian Gai
Harbin Institute of Technology at Weihai, Weihai, China
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Huiying Liu,
Huiying Liu
Harbin Institute of Technology at Weihai, Weihai, China
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Shen Dong
Shen Dong
Harbin Institute of Technology at Weihai, Weihai, China
Search for other works by this author on:
Yuxian Gai
Harbin Institute of Technology at Weihai, Weihai, China
Huiying Liu
Harbin Institute of Technology at Weihai, Weihai, China
Shen Dong
Harbin Institute of Technology at Weihai, Weihai, China
Paper No:
MNC2007-21040, pp. 1149-1155; 7 pages
Published Online:
June 8, 2009
Citation
Gai, Y, Liu, H, & Dong, S. "Vibration Control System for a Sub-Micro Ultra-Precision Turning Machine." Proceedings of the 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems. First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B. Sanya, Hainan, China. January 10–13, 2007. pp. 1149-1155. ASME. https://doi.org/10.1115/MNC2007-21040
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