Rutile tin oxide (SnO2) is a wide band gap (3.6 eV at 300K [1]) n-type semiconductor material. It is widely used as sensing elements in gas sensors [2]. The sensing mechanism is generally attributed to the significant change in the electrical resistance of the material associated with the adsorption/desorption of oxygen on the semiconductor surface [3]. The formation of oxygen adsorbates (O2− or O−) results in an electron-depletion surface layer due to the electron transfer from the oxide surface to oxygen [4]. Recent studies [5, 6] have shown that use of tin oxide nanocrystals significantly improves the dynamic response and the sensitivity of sensors since the electron depletion may occur in the whole crystallite. Here we report on the fabrication and characterization of a miniaturized gas sensor based on tin oxide nanocrystals. A simple, convenient and low-cost mini-arc plasma source is used to synthesize high-quality tin oxide nanoparticles in aerosol phase at atmospheric pressure. The nanoparticle sensor is then fabricated by electrostatic assembly of product tin oxide nanoparticles onto e-beam lithographically patterned interdigitated electrodes. The microfabricated nanoparticle sensor exhibits good sensitivity and dynamic response to low-concentration ethanol vapor and hydrogen gas diluted in air.
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2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
January 10–13, 2007
Sanya, Hainan, China
Conference Sponsors:
- Nanotechnology Institute
ISBN:
0-7918-4265-7
PROCEEDINGS PAPER
Engineering Gas Sensors With Aerosol Nanocrystals
Ganhua Lu,
Ganhua Lu
University of Wisconsin at Milwaukee, Milwaukee, WI
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Liying Zhu,
Liying Zhu
University of Wisconsin at Milwaukee, Milwaukee, WI
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Stephen Hebert,
Stephen Hebert
University of Wisconsin at Milwaukee, Milwaukee, WI
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Leonidas Ocola,
Leonidas Ocola
Argonne National Laboratory, Argonne, IL
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Junhong Chen
Junhong Chen
University of Wisconsin at Milwaukee, Milwaukee, WI
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Ganhua Lu
University of Wisconsin at Milwaukee, Milwaukee, WI
Liying Zhu
University of Wisconsin at Milwaukee, Milwaukee, WI
Stephen Hebert
University of Wisconsin at Milwaukee, Milwaukee, WI
Edward Jen
Nicolet High School, Glendale, WI
Leonidas Ocola
Argonne National Laboratory, Argonne, IL
Junhong Chen
University of Wisconsin at Milwaukee, Milwaukee, WI
Paper No:
MNC2007-21301, pp. 113-114; 2 pages
Published Online:
June 8, 2009
Citation
Lu, G, Zhu, L, Hebert, S, Jen, E, Ocola, L, & Chen, J. "Engineering Gas Sensors With Aerosol Nanocrystals." Proceedings of the 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems. First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B. Sanya, Hainan, China. January 10–13, 2007. pp. 113-114. ASME. https://doi.org/10.1115/MNC2007-21301
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