A two-dimensional ultra-precision positioning system with high-speed and large-range which can be used for micro-nanometer machining has been studied out in this paper. Macro and micro moving system are used to meet the demands of ultra-precision positioning with high-speed and large-range. According to the demands of macro moving system, a valid control of fuzzy-neuron self-adaptive and weighted PID control algorithm with high speed and high precision is proposed. The experimental results show that the error of repeated positioning accuracy is less than 1 μ m for a random point within the range of 300mm by 300mm under the design load for a carrying test-bed with carrying area of 250mm by 250mm. According to the demands of micro moving system, self-adaptive and fuzzy reasoning PID control system based on neural network is studied for the first time. The experimental results show that repeated positioning accuracy is less than 100nm.

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