Fabrication of Al Micro-Coil and Loop by Utilizing Electromigration

Aluminum micro-coil and micro-loop have been fabricated by utilizing electromigration. In a passivated Al line with a slit at the anode end, atoms accumulated before the slit due to high current density and high substrate temperature are released from the pre-introduced holes in the passivation layer, and form micro-fibers owing to crystallization. The fibers are rotated under the existence of the transverse force induced by the tilted holes during their growth, and the micro-coil and micro-loop are fabricated.