Leakage currents in microdevices have a significant impact on their performance and reliability. In the case of a microgyro, leakage currents can cause erroneous measurements, strong dependency on environmental conditions, electrical coupling, performance degradation over time (drift), and even cause failure. The influence of leakage currents on microgyro performance and reliability has been studied in this paper.

This content is only available via PDF.
You do not currently have access to this content.