This paper presents a design optimization of a membrane-based ultrasonic piezoelectric transducer using micromachining by finite element simulation. The transducer can be used to generate ultrasound using the piezoelectric film to excite the vibration of the transducer membrane. The objective is to maximize the vibration magnitude of the membrane by optimizing the structure of the transducer, when the exciting signal is fixed. The size and the shape of the piezoelectric film were selected as the design parameters to optimize the structure of the transducer. Based on the theoretical analysis, it is found that the absolute values of the stresses in the center and the boundary of the diaphragm are greater than that on the other regions of the film, with the directions of the stress on center and boundary opposite to each other. In order to achieve the maximum exciting efficiency, the discrepancy in the stresses between the center and the boundary on the diaphragm should be maximized. In this paper, totally four different piezoelectric film structures are analyzed for optimizing the exciting efficiency of the transducer. The finite element models of the transducer were created using ANSYS. The simulations based on the three design options were performed; and through the comparison of the simulation results, the optimal structural parameters of the piezoelectric film are identified. Finally, the direction of the design improvement for the exciting efficiency of the transducer is provided.
Skip Nav Destination
Close
Sign In or Register for Account
2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
June 3–5, 2008
Clear Water Bay, Kowloon, Hong Kong
Conference Sponsors:
- Nanotechnology Institute
ISBN:
0-7918-4294-0
PROCEEDINGS PAPER
Finite Element Analysis Based Design Optimization of Exciting Efficiency for Micromachined Piezoelectric Transducer
Leon Xu
Leon Xu
Nokia Inc., Beijing, China
Search for other works by this author on:
Chenguang Cai
Nokia Inc., Beijing, China
Quayle Chen
Nokia Inc., Beijing, China
Dujuan Zeng
Nokia Inc., Beijing, China
Fei Deng
Nokia Inc., Beijing, China
Antti Salo
Nokia Inc., Beijing, China
Leon Xu
Nokia Inc., Beijing, China
Paper No:
MicroNano2008-70265, pp. 217-221; 5 pages
Published Online:
June 12, 2009
Citation
Cai, C, Chen, Q, Zeng, D, Deng, F, Salo, A, & Xu, L. "Finite Element Analysis Based Design Optimization of Exciting Efficiency for Micromachined Piezoelectric Transducer." Proceedings of the 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems. 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems. Clear Water Bay, Kowloon, Hong Kong. June 3–5, 2008. pp. 217-221. ASME. https://doi.org/10.1115/MicroNano2008-70265
Download citation file:
- Ris (Zotero)
- Reference Manager
- EasyBib
- Bookends
- Mendeley
- Papers
- EndNote
- RefWorks
- BibTex
- ProCite
- Medlars
Close
Sign In
2
Views
0
Citations
Related Proceedings Papers
Related Articles
Laser Array/EMAT Ultrasonic Measurement of the Penetration Depth in a Liquid Weld Pool
J. Manuf. Sci. Eng (February,2000)
Reduced Model and Application of Inflating Circular Diaphragm Dielectric Elastomer Generators for Wave Energy Harvesting
J. Vib. Acoust (February,2015)
Investigation of Curved Polymeric Piezoelectric Active Diaphragms
J. Vib. Acoust (April,2003)
Related Chapters
Design and Application of Prestress Drill-Grouted Diaphragm Wall in the Foundation Pit Bracing
Geological Engineering: Proceedings of the 1 st International Conference (ICGE 2007)
Micromachined 1-3 Composite Single Element Transducers
High Frequency Piezo-Composite Micromachined Ultrasound Transducer Array Technology for Biomedical Imaging
Micromachined High Frequency Transducer Arrays
High Frequency Piezo-Composite Micromachined Ultrasound Transducer Array Technology for Biomedical Imaging