Design and Simulation of Piezoelectric Micro-Cantilever Ultrasonic Transducers for Audio Directional Loudspeakers

This paper presents a piezoelectric multilayered microcantilever structure as a micro-electro-mechanical system (MEMS) transducer. The proposed micro-transducer is designed for novel audio directional loudspeaker for mobile communication devices. To obtain optimum design parameters and predict the cantilever performance before actual fabrication, the mechanical and electro-mechanical performance was simulated by the finite element method and further validated with theoretical calculation. Finally the fabrication process steps are proposed.