A 1 cm × 1 cm biosensor chip for analyzing DNA hybridization is developed by CMOS process. The sensor chip has 6 measurement regions, each region with 3 pairs of parallel microcantilever of 125 × 60 × 0.75μm. The microcantilever is a 4-layer structure composed of an immobilized surface layer, a top insulation layer, an embedded piezoresistive layer, and a bottom insulation layer to measure the nano-deformation induced by the surface-assemble monolayer of alkanethiols on Au. By the Langmuir adsorption model, the estimated adsorption rate of the ssDNA is 0.005sec−1. The design has intrinsic sensitivity needed in biochemical applications such as detecting nucleotide polymorphism and single base mutation to sequence DNA. The capability of in-situ, multipoint measurement promise many frontiers to be explored.
Skip Nav Destination
ASME 2008 2nd Multifunctional Nanocomposites and Nanomaterials International Conference
January 11–13, 2008
Sharm El Sheikh, Egypt
Conference Sponsors:
- Nanotechnology Institute
ISBN:
0-7918-4291-6
PROCEEDINGS PAPER
Measurement of DNA Hybridization by Nano-Deformation of Microcantilever in CMOS Biosensor
S. M. Yang,
S. M. Yang
National Cheng Kung University, Tainan, Taiwan, R.O.C.
Search for other works by this author on:
T. I. Yin,
T. I. Yin
National Cheng Kung University, Tainan, Taiwan, R.O.C.
Search for other works by this author on:
C. Chang
C. Chang
National Cheng Kung University, Tainan, Taiwan, R.O.C.
Search for other works by this author on:
S. M. Yang
National Cheng Kung University, Tainan, Taiwan, R.O.C.
T. I. Yin
National Cheng Kung University, Tainan, Taiwan, R.O.C.
C. Chang
National Cheng Kung University, Tainan, Taiwan, R.O.C.
Paper No:
MN2008-47047, pp. 217-221; 5 pages
Published Online:
June 5, 2009
Citation
Yang, SM, Yin, TI, & Chang, C. "Measurement of DNA Hybridization by Nano-Deformation of Microcantilever in CMOS Biosensor." Proceedings of the ASME 2008 2nd Multifunctional Nanocomposites and Nanomaterials International Conference. ASME 2008 2nd Multifunctional Nanocomposites and Nanomaterials. Sharm El Sheikh, Egypt. January 11–13, 2008. pp. 217-221. ASME. https://doi.org/10.1115/MN2008-47047
Download citation file:
1
Views
Related Proceedings Papers
Related Articles
Construction of a Magnetic Biosensor for Pathogen Detection
J. Med. Devices (June,2008)
Design and TEM Simulation of a MEMS Based Microcantilever Cardiac Marker Sensor
J. Nanotechnol. Eng. Med (February,2010)
Enhancement of the Analyte Mass Transport in a Microfluidic Biosensor by Deformation of Fluid Flow and Electrothermal Force
J. Manuf. Sci. Eng (August,2016)
Related Chapters
4-Bit Pipeline ADC for Monolithic Active Pixel Sensors
International Conference on Advanced Computer Theory and Engineering (ICACTE 2009)
Fabrication of impedimetric biosensors
Impedimetric Biosensors for Medical Applications: Current Progress and Challenges
Research and Development of On-Line Partial Discharge Monitroevg Deveices on Medium Voltage Power Equipment
International Conference on Mechanical and Electrical Technology, 3rd, (ICMET-China 2011), Volumes 1–3