A 1 cm × 1 cm biosensor chip for analyzing DNA hybridization is developed by CMOS process. The sensor chip has 6 measurement regions, each region with 3 pairs of parallel microcantilever of 125 × 60 × 0.75μm. The microcantilever is a 4-layer structure composed of an immobilized surface layer, a top insulation layer, an embedded piezoresistive layer, and a bottom insulation layer to measure the nano-deformation induced by the surface-assemble monolayer of alkanethiols on Au. By the Langmuir adsorption model, the estimated adsorption rate of the ssDNA is 0.005sec−1. The design has intrinsic sensitivity needed in biochemical applications such as detecting nucleotide polymorphism and single base mutation to sequence DNA. The capability of in-situ, multipoint measurement promise many frontiers to be explored.
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ASME 2008 2nd Multifunctional Nanocomposites and Nanomaterials International Conference
January 11–13, 2008
Sharm El Sheikh, Egypt
Conference Sponsors:
- Nanotechnology Institute
ISBN:
0-7918-4291-6
PROCEEDINGS PAPER
Measurement of DNA Hybridization by Nano-Deformation of Microcantilever in CMOS Biosensor
S. M. Yang
,
S. M. Yang
National Cheng Kung University, Tainan, Taiwan, R.O.C.
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T. I. Yin
,
T. I. Yin
National Cheng Kung University, Tainan, Taiwan, R.O.C.
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C. Chang
C. Chang
National Cheng Kung University, Tainan, Taiwan, R.O.C.
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S. M. Yang
National Cheng Kung University, Tainan, Taiwan, R.O.C.
T. I. Yin
National Cheng Kung University, Tainan, Taiwan, R.O.C.
C. Chang
National Cheng Kung University, Tainan, Taiwan, R.O.C.
Paper No:
MN2008-47047, pp. 217-221; 5 pages
Published Online:
June 5, 2009
Citation
Yang, SM, Yin, TI, & Chang, C. "Measurement of DNA Hybridization by Nano-Deformation of Microcantilever in CMOS Biosensor." Proceedings of the ASME 2008 2nd Multifunctional Nanocomposites and Nanomaterials International Conference. ASME 2008 2nd Multifunctional Nanocomposites and Nanomaterials. Sharm El Sheikh, Egypt. January 11–13, 2008. pp. 217-221. ASME. https://doi.org/10.1115/MN2008-47047
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