A 1 cm × 1 cm biosensor chip for analyzing DNA hybridization is developed by CMOS process. The sensor chip has 6 measurement regions, each region with 3 pairs of parallel microcantilever of 125 × 60 × 0.75μm. The microcantilever is a 4-layer structure composed of an immobilized surface layer, a top insulation layer, an embedded piezoresistive layer, and a bottom insulation layer to measure the nano-deformation induced by the surface-assemble monolayer of alkanethiols on Au. By the Langmuir adsorption model, the estimated adsorption rate of the ssDNA is 0.005sec−1. The design has intrinsic sensitivity needed in biochemical applications such as detecting nucleotide polymorphism and single base mutation to sequence DNA. The capability of in-situ, multipoint measurement promise many frontiers to be explored.
- Nanotechnology Institute
Measurement of DNA Hybridization by Nano-Deformation of Microcantilever in CMOS Biosensor
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Yang, SM, Yin, TI, & Chang, C. "Measurement of DNA Hybridization by Nano-Deformation of Microcantilever in CMOS Biosensor." Proceedings of the ASME 2008 2nd Multifunctional Nanocomposites and Nanomaterials International Conference. ASME 2008 2nd Multifunctional Nanocomposites and Nanomaterials. Sharm El Sheikh, Egypt. January 11–13, 2008. pp. 217-221. ASME. https://doi.org/10.1115/MN2008-47047
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