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Proceedings Papers

Thermomechanics of High-Pressure MEMS Sensors

Available to Purchase

Ryszard J. Pryputniewicz
Proc. ASME. InterPACK2007, ASME 2007 InterPACK Conference, Volume 2, 971-977, July 8–12, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IPACK2007-33501
https://doi.org/10.1115/IPACK2007-33501
... thermomechanical deformations hybrid methodology uncertainty analysis noninvasive measurements design by analysis 1 Copyright © 2007 by ASME Proceedings of IPACK2007 ASME InterPACK '07 July 8-12, 2007, Vancouver, British Columbia, CANADA IPACK2007-33501 THERMOMECHANICS OF HIGH-PRESSURE MEMS SENSORS Ryszard...
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Topics: Deformation, Design, Diaphragms (Mechanical devices), Diaphragms (Structural), High pressure (Physics), Microelectromechanical systems, Pressure, Sensors, Thermomechanics, Uncertainty analysis