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Keywords: multilayer diaphragm
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Proceedings Papers

Thermomechanics of High-Pressure MEMS Sensors

Available to Purchase

Ryszard J. Pryputniewicz
Proc. ASME. InterPACK2007, ASME 2007 InterPACK Conference, Volume 2, 971-977, July 8–12, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IPACK2007-33501
https://doi.org/10.1115/IPACK2007-33501
... by analysis” approach to efficient and effective developments of new MEMS sensors. In this paper the hybrid approach is described and its use is illustrated by representative examples addressing high-pressure MEMS sensors. MEMS high-pressure sensor differential pressure multilayer diaphragm...
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Topics: Deformation, Design, Diaphragms (Mechanical devices), Diaphragms (Structural), High pressure (Physics), Microelectromechanical systems, Pressure, Sensors, Thermomechanics, Uncertainty analysis