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Keywords: differential pressure
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Proceedings Papers

Thermomechanics of High-Pressure MEMS Sensors

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Ryszard J. Pryputniewicz
Proc. ASME. InterPACK2007, ASME 2007 InterPACK Conference, Volume 2, 971-977, July 8–12, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IPACK2007-33501
https://doi.org/10.1115/IPACK2007-33501
..., utilizes polysilicon-sensing technology. The unique polysilicon piezoresistive sensor (PPS) measures differential pressure (DP) based on deformations of a multilayer/multimaterial diaphragm, which is about 2 μm thick. Deformations of a diaphragm, subjected to changes in pressure, are sensed...
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Topics: Deformation, Design, Diaphragms (Mechanical devices), Diaphragms (Structural), High pressure (Physics), Microelectromechanical systems, Pressure, Sensors, Thermomechanics, Uncertainty analysis