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Keywords: Transient thermo-structural simulation
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Proceedings Papers
Proc. ASME. InterPACK2013, Volume 1: Advanced Packaging; Emerging Technologies; Modeling and Simulation; Multi-Physics Based Reliability; MEMS and NEMS; Materials and Processes, V001T04A002, July 16–18, 2013
Publisher: American Society of Mechanical Engineers
Paper No: IPACK2013-73061
... to the combination of increasing heat transfer coefficient, and increased damping, as the pressure increases. KEYWORDS Thermal nano-resonator, Transient thermo-structural simulation, thermal actuation. 1 INTRODUCTION MEMS and NEMS thermally actuated resonators can be applied to temperature measurement sensors [1...
