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Keywords: Surface micromachined microfluidics
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Proceedings Papers

Proc. ASME. InterPACK2005, Advances in Electronic Packaging, Parts A, B, and C, 2023-2032, July 17–22, 2005
Publisher: American Society of Mechanical Engineers
Paper No: IPACK2005-73491
... patterning system. Surface micromachined microfluidics DEP Drop Ejector Proceedings of IPACK2005 ASME InterPACK '05 Proceedings of IPACK2005 ASME InterPACK 05 July 17-22, San Francisco California, USA IPACK2005-73491 Surface Micromachined Microfluidics - Example Microsystems, Challenges...