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Proceedings Papers

8CH AWG Multi/Demultiplexer With MEMS Variable Optical Attenuator

K. Ishikawa, Q. Yu
Proc. ASME. InterPACK2003, 2003 International Electronic Packaging Technical Conference and Exhibition, Volume 1, 239-244, July 6–11, 2003
Publisher: American Society of Mechanical Engineers
Paper No: IPACK2003-35145
https://doi.org/10.1115/IPACK2003-35145
... An integrated arrayed waveguide grating multi/demultiplexer (AWG) with a micro-electro-mechanical systems (MEMS) based variable optical attenuator (VOA) is reported. The device consists of an AWG based on silica and a MEMS-VOA chip. The MEMS chip includes 100 μm × 100 μm polysilicon shutter...
View Paper titled, 8CH <span class="search-highlight">AWG</span> Multi&#x2F;Demultiplexer With MEMS Variable Optical Attenuator
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Topics: Microelectromechanical systems