Thermal-aware techniques for 3D ICs have shown that high temperatures dramatically reduce the lifetime and the reliability of the 3D ICs with utilizing the third dimension. Hence, thermal management has been very crucial for the further improvement of the 3D IC architecture. There has been some thermal management strategies suggested at the micro/nano scale to alleviate the nonlocal heat dissipation; however, many solution methods such as liquid cooling have challenges and create many problems. In this paper, we propose nanoparticle based interfacial cooling to improve the thermal transport due to surface phonon polariton coupling and to reduce the thermal resistance between the interfaces. We demonstrate the efficiency of the heat dissipation from the proposed structure for 3D ICs.

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