We report on experimental demonstration of multilayer molybdenum disulfide (MoS2) nanomechanical resonators integrated on microchannels, with the potential for resonant operation and sensing applications in microfluidics. Microchannels with width of ∼5μm and depth of ∼1–2μm are fabricated on polydimethylsiloxane (PDMS) substrate. We transfer MoS2 flakes with both singly-clamped cantilever and doubly-clamped membrane structure onto the PDMS channels, and measure both undriven thermomechanical resonances and optically driven responses from the devices. The devices show up to 6 thermomechanical resonances, with highest resonance frequency (fres) of 16.3MHz and quality (Q) factor ∼200. This type of MoS2 nanomechanical resonators, when integrated with microfluidics in microchannels, would make new interesting candidates for biosensing and chemical sensing in fluids.
- Electronic and Photonic Packaging Division
Molybdenum Disulfide (MoS2) Nanomechanical Resonators Integrated on Microchannels
Yang, R, Li, Z, & Feng, PX. "Molybdenum Disulfide (MoS2) Nanomechanical Resonators Integrated on Microchannels." Proceedings of the ASME 2015 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems collocated with the ASME 2015 13th International Conference on Nanochannels, Microchannels, and Minichannels. Volume 3: Advanced Fabrication and Manufacturing; Emerging Technology Frontiers; Energy, Health and Water- Applications of Nano-, Micro- and Mini-Scale Devices; MEMS and NEMS; Technology Update Talks; Thermal Management Using Micro Channels, Jets, Sprays. San Francisco, California, USA. July 6–9, 2015. V003T07A003. ASME. https://doi.org/10.1115/IPACK2015-48590
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