We report on experimental demonstration of multilayer molybdenum disulfide (MoS2) nanomechanical resonators integrated on microchannels, with the potential for resonant operation and sensing applications in microfluidics. Microchannels with width of ∼5μm and depth of ∼1–2μm are fabricated on polydimethylsiloxane (PDMS) substrate. We transfer MoS2 flakes with both singly-clamped cantilever and doubly-clamped membrane structure onto the PDMS channels, and measure both undriven thermomechanical resonances and optically driven responses from the devices. The devices show up to 6 thermomechanical resonances, with highest resonance frequency (fres) of 16.3MHz and quality (Q) factor ∼200. This type of MoS2 nanomechanical resonators, when integrated with microfluidics in microchannels, would make new interesting candidates for biosensing and chemical sensing in fluids.

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