Molybdenum Disulfide (MoS₂) Nanomechanical Resonators Integrated on Microchannels

We report on experimental demonstration of multilayer molybdenum disulfide (MoS₂) nanomechanical resonators integrated on microchannels, with the potential for resonant operation and sensing applications in microfluidics. Microchannels with width of ∼5μm and depth of ∼1–2μm are fabricated on polydimethylsiloxane (PDMS) substrate. We transfer MoS₂ flakes with both singly-clamped cantilever and doubly-clamped membrane structure onto the PDMS channels, and measure both undriven thermomechanical resonances and optically driven responses from the devices. The devices show up to 6 thermomechanical resonances, with highest resonance frequency (f_res) of 16.3MHz and quality (Q) factor ∼200. This type of MoS₂ nanomechanical resonators, when integrated with microfluidics in microchannels, would make new interesting candidates for biosensing and chemical sensing in fluids.