In order to develop a new structure microwave probe, the fabrication of the atomic force microscope (AFM) probe on a GaAs wafer was studied. The fabricated probe had a tip of 8 μm high and curvature radius approximately 30 nm. The dimensions of the cantilever are 250 × 30 × 15 μm. A waveguide was introduced by evaporating Au film on the top and bottom surfaces of the GaAs AFM probe. The open structure of the waveguide at the tip of the probe was introduced by using focused ion beam (FIB) fabrication. To improve the resolution of AFM measurement, only the metal film was removed at the end of the probe tip. AFM topography of a grating sample was measured by the fabricated probe. As a result, it was found that the resolution of AFM measurement and the ratio of signal to noise were enhanced.
Skip Nav Destination
ASME 2009 InterPACK Conference collocated with the ASME 2009 Summer Heat Transfer Conference and the ASME 2009 3rd International Conference on Energy Sustainability
July 19–23, 2009
San Francisco, California, USA
Conference Sponsors:
- Electronic and Photonic Packaging Division
ISBN:
978-0-7918-4359-8
PROCEEDINGS PAPER
Optimization of the Tip of Microwave AFM Probe
Motohiro Hamada,
Motohiro Hamada
Nagoya University, Nagoya, Japan
Search for other works by this author on:
Atsushi Hosoi,
Atsushi Hosoi
Nagoya University, Nagoya, Japan
Search for other works by this author on:
Akifumi Fujimoto
Akifumi Fujimoto
Nagoya University, Nagoya, Japan
Search for other works by this author on:
Yang Ju
Nagoya University, Nagoya, Japan
Motohiro Hamada
Nagoya University, Nagoya, Japan
Atsushi Hosoi
Nagoya University, Nagoya, Japan
Akifumi Fujimoto
Nagoya University, Nagoya, Japan
Paper No:
InterPACK2009-89252, pp. 485-490; 6 pages
Published Online:
December 24, 2010
Citation
Ju, Y, Hamada, M, Hosoi, A, & Fujimoto, A. "Optimization of the Tip of Microwave AFM Probe." Proceedings of the ASME 2009 InterPACK Conference collocated with the ASME 2009 Summer Heat Transfer Conference and the ASME 2009 3rd International Conference on Energy Sustainability. ASME 2009 InterPACK Conference, Volume 1. San Francisco, California, USA. July 19–23, 2009. pp. 485-490. ASME. https://doi.org/10.1115/InterPACK2009-89252
Download citation file:
10
Views
Related Proceedings Papers
Related Articles
Utilizing Off-Resonance and Dual-Frequency Excitation to Distinguish Attractive and Repulsive Surface Forces in Atomic Force Microscopy
J. Comput. Nonlinear Dynam (July,2011)
Influence of Local Material Properties on the Nonlinear Dynamic Behavior of an Atomic Force Microscope Probe
J. Comput. Nonlinear Dynam (October,2011)
The Effect of Asperity Array Geometry on Friction and Pull-Off Force
J. Tribol (October,1997)
Related Chapters
Microwave Modules and GaAs Chips
Thermal Management of Microelectronic Equipment, Second Edition
Computer Aided Design of Tools, Dies, and Moulds (TDMs)
Computer Aided Design and Manufacturing
Cooling a Radar’s Electronic Board
Electromagnetic Waves and Heat Transfer: Sensitivites to Governing Variables in Everyday Life