Advances in MEMS/NEMS techniques have enabled high-Q whispering-gallery modes in integrated microcavities. Potential applications of optical microcavities include quantum informatics, novel micro/nano sources, dynamic filters, and micro/nanosensors. It is important to understand the intrinsic resonant modes of a cavity. In this report, we will analyze whispering-gallery modes in resonators of planar structure which is common in MEMS devices. The wave equation is solved by using the method of separation of variables with appropriate boundary conditions. Analytical formulations are established. The resonance frequencies as well as the electric field distributions in exemplary resonators are presented for a variety of whispering-gallery modes.
- Electronic and Photonic Packaging Division
Analytical Solution of Whispering-Gallery Modes
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Quan, H, & Guo, Z. "Analytical Solution of Whispering-Gallery Modes." Proceedings of the ASME 2007 InterPACK Conference collocated with the ASME/JSME 2007 Thermal Engineering Heat Transfer Summer Conference. ASME 2007 InterPACK Conference, Volume 1. Vancouver, British Columbia, Canada. July 8–12, 2007. pp. 489-497. ASME. https://doi.org/10.1115/IPACK2007-33124
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