1D optical micro scanners driven by piezoelectric actuators have designed, simulated, fabricated and tested. The newly designed micro scanners have a structure that rotation bars, hinges and PZT cantilevers support a square mirror (1mm × 1mm). Flat-structured micro scanners have been fabricated from Pt/PZT/Pt/Ti/SiO2/SOI(Si/SiO2/Si) multi-layered structure through conventional MEMS micro fabrication technologies. The micro scanner driven at 10 V showed an optical scan angle of 1.5 degree for the static actuation (60 Hz) and of 13 degree for the resonant actuation (4825 Hz), respectively.

This content is only available via PDF.
You do not currently have access to this content.