1D optical micro scanners driven by piezoelectric actuators have designed, simulated, fabricated and tested. The newly designed micro scanners have a structure that rotation bars, hinges and PZT cantilevers support a square mirror (1mm × 1mm). Flat-structured micro scanners have been fabricated from Pt/PZT/Pt/Ti/SiO2/SOI(Si/SiO2/Si) multi-layered structure through conventional MEMS micro fabrication technologies. The micro scanner driven at 10 V showed an optical scan angle of 1.5 degree for the static actuation (60 Hz) and of 13 degree for the resonant actuation (4825 Hz), respectively.
- Heat Transfer Division and Electronic and Photonic Packaging Division
Development of 1D Optical Micro Scanner Driven by Piezoelectric Actuators
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Kobayashi, T, Tsaur, J, & Maeda, R. "Development of 1D Optical Micro Scanner Driven by Piezoelectric Actuators." Proceedings of the ASME 2005 Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems collocated with the ASME 2005 Heat Transfer Summer Conference. Advances in Electronic Packaging, Parts A, B, and C. San Francisco, California, USA. July 17–22, 2005. pp. 789-792. ASME. https://doi.org/10.1115/IPACK2005-73431
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