A new developed liquid packaging approach dramatically improves the performance of MEMS tunable capacitors. Previous devices suffered from slow response times due to mechanical ringing and poor vibration immunity. By packaging the device in the appropriate liquid, critical damping has been achieved and response times as fast as 50ms have been demonstrated.
- Heat Transfer Division and Electronic and Photonic Packaging Division
Liquid Packaged MEMS Tunable Capacitors With Fast Response Times and Reduced Vibration Sensitivity
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Borwick, RL, III, Stupar, PA, & DeNatale, J. "Liquid Packaged MEMS Tunable Capacitors With Fast Response Times and Reduced Vibration Sensitivity." Proceedings of the ASME 2005 Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems collocated with the ASME 2005 Heat Transfer Summer Conference. Advances in Electronic Packaging, Parts A, B, and C. San Francisco, California, USA. July 17–22, 2005. pp. 2037-2040. ASME. https://doi.org/10.1115/IPACK2005-73129
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