A new developed liquid packaging approach dramatically improves the performance of MEMS tunable capacitors. Previous devices suffered from slow response times due to mechanical ringing and poor vibration immunity. By packaging the device in the appropriate liquid, critical damping has been achieved and response times as fast as 50ms have been demonstrated.

Volume Subject Area:
RF MEMS
Topics:
Capacitors, Microelectromechanical systems, Vibration, Packaging, Damping
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Copyright © 2005
 by ASME
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