In the present study fluid flow and heat transfer characteristics of a microchannel heat sink subject to an impinging jet are experimentally investigated. In order to evaluate the cooling performance of a microchannel heat sink subject to an impinging jet under the fixed pumping power condition, the pressure drop across a microchannel heat sink and temperature distributions at the base of it are measured. Especially, a micro-thermal sensor array is manufactured with simple and convenient microfabrication processes to measure temperature distributions at the base of the heat sink accurately. Based on these experimental results, we suggest a correlation for the pressure drop across a microchannel heat sink subject to an impinging jet as well as a correlation for the thermal resistance of that. In addition, we show that the cooling performance of a microchannel heat sink subject to an impinging jet is superior to that of the microchannel heat sink subject to a parallel flow.

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