Barrios, P, Janz, S, Golub, I, Poole, P, Chow-Chong, P, Poitras, D, Sproule, I, Malloy, M, Delaˆge, A, McKinnon, R, Syrett, B, El-Mougy, S, & Abdalla, S. "O+-Ion Implantation for Practical InP-Based Digital Optical Switches." Proceedings of the ASME 2003 International Electronic Packaging Technical Conference and Exhibition. 2003 International Electronic Packaging Technical Conference and Exhibition, Volume 1. Maui, Hawaii, USA. July 6–11, 2003. pp. 651-654. ASME. https://doi.org/10.1115/IPACK2003-35199
Download citation file:
The fabrication of Digital Optical Switches with O+-ion implanted - electrical isolated - branches is described. Multiple- vs. single-implantation schemes and their effect on sheet resistance is compared using TLM and SIMS measurements.
