In this paper, a new thermal actuator for micromirror control with very low operating voltage is described. The actuator consists of three straight polysilicon cantilever arms and a polysilicon winding arm that is inherently twisted due to stress-induced bending. Controlling heat generating positions in those arms, the actuator shows both torsional and vertical motions. Mechanical-electro-thermal FEM simulation results show that the actuator has more than a 1.11 degree twisting angle and a 2.31 μm vertical displacement. In order to enhance torsional motion, design optimization is carried out by using a response surface method called the statistical design support system. After optimization, the total twisting angle improves to 2.05 degrees which is enough to actuate micromirrors for optical beam adjusting, switching and attenuating.
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ASME 2003 International Electronic Packaging Technical Conference and Exhibition
July 6–11, 2003
Maui, Hawaii, USA
Conference Sponsors:
- Electronic and Photonic Packaging Division
ISBN:
0-7918-3690-8
PROCEEDINGS PAPER
A Research of Actuators for Micromirror Control
Hiroki Mamiya,
Hiroki Mamiya
Yokohama National University, Yokohama, Japan
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Koji Ishikawa,
Koji Ishikawa
Yokohama National University, Yokohama, Japan
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Qiang Yu
Qiang Yu
Yokohama National University, Yokohama, Japan
Search for other works by this author on:
Hiroki Mamiya
Yokohama National University, Yokohama, Japan
Koji Ishikawa
Yokohama National University, Yokohama, Japan
Qiang Yu
Yokohama National University, Yokohama, Japan
Paper No:
IPACK2003-35123, pp. 233-238; 6 pages
Published Online:
January 5, 2009
Citation
Mamiya, H, Ishikawa, K, & Yu, Q. "A Research of Actuators for Micromirror Control." Proceedings of the ASME 2003 International Electronic Packaging Technical Conference and Exhibition. 2003 International Electronic Packaging Technical Conference and Exhibition, Volume 1. Maui, Hawaii, USA. July 6–11, 2003. pp. 233-238. ASME. https://doi.org/10.1115/IPACK2003-35123
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