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Keywords: thickness control
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Proceedings Papers

Proc. ASME. ISPS2020, ASME 2020 29th Conference on Information Storage and Processing Systems, V001T04A001, June 24–25, 2020
Publisher: American Society of Mechanical Engineers
Paper No: ISPS2020-1925
... be confirmed by FE-SEM observation. mass production mesoporous silica micro nano thickness control coating MASS PRODUCTION AND FILM THICKNESS CONTROL OF MESO POROUS SILICA THIN FILMS Makio Tamada Tokai University, Hiratsuka, Japan Yuta Sunami Tokai University, Hiratsuka, Japan ABSTRACT Mesoporous...