1-1 of 1
Keywords: spot array alignment
Close
Save search
Follow your search
Access your saved searches in your account
Would you like to receive an alert when new items match your search?
Close Modal
Sort by
Proceedings Papers

Parallel Micro Manipulator for Effective Optical Spot Array Alignment

Available to Purchase

Zheng Yuan Li, Sae Whan Park, Yong Seok Inh, Jong Yoon Choi, Ja Choon Koo
Proc. ASME. ISPS2014, 2014 Conference on Information Storage and Processing Systems, V001T07A005, June 23–24, 2014
Publisher: American Society of Mechanical Engineers
Paper No: ISPS2014-6929
https://doi.org/10.1115/ISPS2014-6929
... 1 Copyright © 2014 by ASME PARALLEL MICRO MANIPULATOR FOR EFFECTIVE OPTICAL SPOT ARRAY ALIGNMENT Zheng Yuan Li Sungkyunkwan University Suwon, Gyeonggi-do, Korea Sae Whan Park Sungkyunkwan University Suwon, Gyeonggi-do, Korea Yong Seok Ihn Sungkyunkwan University Suwon, Gyeonggi-do, Korea Jong Yoon...
View Paper titled, Parallel Micro Manipulator for Effective Optical Spot Array Alignment
Open the PDF for Parallel Micro Manipulator for Effective Optical Spot Array Alignment in another window
Topics: Genetic algorithms, Manipulators, Maskless lithography