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Proceedings Papers

Parallel Micro Manipulator for Effective Optical Spot Array Alignment

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Zheng Yuan Li, Sae Whan Park, Yong Seok Inh, Jong Yoon Choi, Ja Choon Koo
Proc. ASME. ISPS2014, 2014 Conference on Information Storage and Processing Systems, V001T07A005, June 23–24, 2014
Publisher: American Society of Mechanical Engineers
Paper No: ISPS2014-6929
https://doi.org/10.1115/ISPS2014-6929
... amount of tack time, installing autonomous position align micro parallel manipulator system in each optical heads required. Applied parallel manipulator that consists of four 2-DOF (degree of freedom) decoupled actuator gives chances to provide 6-DOF independence motion, and has strength in high accuracy...
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Topics: Genetic algorithms, Manipulators, Maskless lithography