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Keywords: Genetic Algorithm
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Proceedings Papers

Parallel Micro Manipulator for Effective Optical Spot Array Alignment

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Zheng Yuan Li, Sae Whan Park, Yong Seok Inh, Jong Yoon Choi, Ja Choon Koo
Proc. ASME. ISPS2014, 2014 Conference on Information Storage and Processing Systems, V001T07A005, June 23–24, 2014
Publisher: American Society of Mechanical Engineers
Paper No: ISPS2014-6929
https://doi.org/10.1115/ISPS2014-6929
... manipulator and analyzing kinematic characteristic of the 4- [PP]PS parallel manipulator is described. After that, comparing benefits and drawbacks of 4-[PP]PS parallel and 4-DOF serial manipulator is covered. Third, proposing a suitable error model of the system and applying the genetic algorithm...
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Topics: Genetic algorithms, Manipulators, Maskless lithography