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Proceedings Papers

Optical Head Alignment Method Using Serial Manipulators for Maskless Lithography System

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Jong Yoon Choi, Sae Whan Park, Yong Seok Inh, Zheng Yuan Li, Ja Choon Koo
Proc. ASME. ISPS2014, 2014 Conference on Information Storage and Processing Systems, V001T07A004, June 23–24, 2014
Publisher: American Society of Mechanical Engineers
Paper No: ISPS2014-6927
https://doi.org/10.1115/ISPS2014-6927
View Paper titled, Optical Head Alignment Method Using Serial Manipulators for Maskless Lithography System
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Topics: Manipulators, Maskless lithography, Algorithms, Errors, Kinematics, Design, Lithography, Reflectance, Cathode ray oscilloscopes, Electron beams
Proceedings Papers

Parallel Micro Manipulator for Effective Optical Spot Array Alignment

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Zheng Yuan Li, Sae Whan Park, Yong Seok Inh, Jong Yoon Choi, Ja Choon Koo
Proc. ASME. ISPS2014, 2014 Conference on Information Storage and Processing Systems, V001T07A005, June 23–24, 2014
Publisher: American Society of Mechanical Engineers
Paper No: ISPS2014-6929
https://doi.org/10.1115/ISPS2014-6929
View Paper titled, Parallel Micro Manipulator for Effective Optical Spot Array Alignment
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Topics: Genetic algorithms, Manipulators, Maskless lithography
Proceedings Papers

Position Alignment of Micro Manipulator Using Root Mean Square Errors for Maskless Lithography System

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Yong Seok Ihn, Sae Whan Park, Ja Choon Koo
Proc. ASME. ISPS2013, ASME 2013 Conference on Information Storage and Processing Systems, V001T07A013, June 24–25, 2013
Publisher: American Society of Mechanical Engineers
Paper No: ISPS2013-2943
https://doi.org/10.1115/ISPS2013-2943
View Paper titled, Position Alignment of Micro Manipulator Using Root Mean Square Errors for Maskless Lithography System
Open the PDF for Position Alignment of Micro Manipulator Using Root Mean Square Errors for Maskless Lithography System in another window
Topics: Errors, Manipulators, Maskless lithography, Mirrors, Photomasks, Lithography, Microelectromechanical systems, Manufacturing, Semiconductors (Materials)