Abstract
Micromirror has many applications including vision systems, optical networking, and laser projects. Most of them are operated on a resonant mode for high-speed scan operation, but there are large demands for statically controlled mirrors with large deflection. In this paper, we propose a dual-axes scanning micromirror for large deflection, which also has the advantages of wide frequency bandwidth and low manufacturing cost. To achieve large deflection, we design and develop a customized electromagnetic actuator as a driving mechanism, which is composed of one permanent magnet and four electromagnets. The permanent is attached to the back of the mirror that has an elastic compliant membrane. The hybrid integration of microfabricated and off-the-shelf components enables low-risk/high-yield fabrication while limiting the throughput. We carry out simulations and experiments to evaluate the performance of the developed electromagnetic actuator and bi-axial scanning micro-mirror.
