The magnetic spacing of Hard Disk Drives (HDD) needs to be reduced for high recording density. On the other hand, it is necessary to prevent contact between the slider and disk for reliability of HDDs. Various research was carried out for the flying stability of the slider [1–3]. Furthermore, the magnetic track width also needs to be narrowed for high recording density. The Dual Stage Actuator (DSA) servo system is used for high positioning accuracy [4]. The DSA servo system uses a piezoelectric actuator on a suspension in addition to Voice Coil Motor (VCM). In this study, we measured vibrations to the slider and suspension caused by the PZT and VCM actuations. Two Laser Doppler Vibrometers (LDV) were used for the measurement. Moreover, we performed a numerical analysis to estimate the roll moment of the Air Bearing Surface (ABS) of the slider caused by PZT actuation. As results, we confirmed that the ABS vibrated in vertical direction due to the suspension’s vibrations caused by PZT and VCM actuations.

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