A thermal contact sensor embedded in a magnetic-head slider was developed. The sensor has been used for contact detection between a head slider and a disk in hard disk drives, and, our previous research has shown that the sensor could successfully detect disk defects including asperities and pits. In this work, the sensor dimension effect and characterization of defect size was studied in order to better understanding of defect size. The results showed that the defect size can be clarified by considering sensor size and scan pitch.

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