Groove Shape Optimization of Thrust Air Bearing for Small Size Spindle Considering the Processing Errors

In this research, we aim to examine the usefulness of the newly developed spindle motor proposed by Ochiai. Since machining error due to tool wear etc. used for microfabrication can be ignored, laser processing was used as a processing method. Thrust bearing grooves were generated by laser processing, and variation in groove depth was observed. Finally, the optimum shape of the thrust bearing groove was obtained by robust optimization using the probability distribution that can be approximated from the obtained machining error.