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Keywords: wire-free fully integrated microsystems
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Proceedings Papers

Proc. ASME. IMECE2004, Electronic and Photonic Packaging, Electrical Systems Design and Photonics, and Nanotechnology, 319-326, November 13–19, 2004
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2004-60879
... MOEMS microfluidics packaging wire-free fully integrated microsystems Proceedings of IMECE04 2004 ASME International Mechanical Engineering Congress and Exposition November 13-20, 2004, Anaheim, California USA 9 micromachined MEMS (SUMMiT ) and microfluidics (SwIFT ) (www.sandia.gov/mstc...