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Keywords: nanolithography
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Proceedings Papers

Proc. ASME. IMECE2003, Microelectromechanical Systems, 629-636, November 15–21, 2003
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2003-41762
... implies a reduction in meniscus size that may potentially improve the resolution of AFM-based nanolithography techniques. meniscus AFM adhesion nanolithography temperature ABSTR Wh air, capi the AFM the tem describe AFM ti humidit tempera depende propose surface. with tim experim laser...
Proceedings Papers

Proc. ASME. IMECE2006, Electronic and Photonic Packaging, Electrical Systems Design and Photonics, and Nanotechnology, 209-214, November 5–10, 2006
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2006-15581
... to the silicon chip alone. bio-assay mass sensor piezoelectric nanolithography cancer diagnosis Fritz J. et al., “ Translating biomolecular recognition into nanomechanics ”. Science 288 , 316 – 318 , 2000 . Raiteri R. , Nelles G. , Butt H.-J. , Knoll W...