... Abstract A new aluminum based valveless fluid micropump is designed by micromachining method. The pump consists of two fluid diffuser/nozzle elements on each side of a chamber with an oscillating diaphragm which is actuated with a piezoelectric disc. The two simultaneously vibrating diaphragms...

... and modification of the multiplayer circuits is highly desired, which is difficult or impossible by using traditional manufacturing techniques. Laser ablation provides a practical alternative for precise micromachining of thermal-sprayed multilayer samples, especially using femtosecond lasers where materials can...

... in the micrometer scale must be patterned. ultra-violet (UV) Excimer laser micromachining for biomedical Conventional techniques can not deliver cost-effective solutions applications. In this work, Parametric investigations were conducted to produce micro-patterns on the polymer surface. Photolithography...

... The aim of this research is to investigate the effect of elastic recovery on the ability to precisely control depth of cut when micromachining channels in poly(methyl methacrylate) (PMMA). Both a standard and impact resistant PMMA were machined using an orthogonal micro-slitting arrangement...

... Compared with lithographic techniques, mechanical micromachining is a potential competitive process for fabricating 3D micro/meso components or macro parts with micro-features from diverse materials at high accuracy, efficiency, and low costs, but the size effect induced by the comparable size...

... magnetometer accelerometer micromachining Lorentz force A new magnetometer-accelerometer is developed with the silicon micromachining. The application areas include the cellular phones providing the third generation (3G) mobile service, and 3D game devices. The structure with a current...

... 14 05 2008 This work describes a new post-CMOS (Complementary Metal Oxide Semiconductor) bulk micromachining process for fabrication of various microstructures. The important feature of the post-CMOS process is the use of wet etching without an addition mask, to form various...

..., continuum models predict that curled chips incorporate stresses due to the establishment of a secondary shear zone. A model is presented in terms of the heterogeneous aspects of continuous chip formation, which shows very good agreement with experimental data. Chip formation materials micromachining...

... 28 01 2008 The inherent residual stresses and strains from micro fabrication process can have profound effects on the functionality and reliability of MEMS devices. Surface micromachining fabrication involves a series of sequential steps of addition and subtraction of materials through...

..., and appropriate mechanical response for use as sensors in surface force microscopy. injection molding microcantilevers micromachining biosensors bioMEMS Corbett J. , McKeown P. A. , Peggs G. N. , and Whatmore R. , 2000 , “ Nanotechnology: international development and emerging...