... MEMs electrostatic energy harvesters dynamics frequency-up conversion oscillators Abstract With the proliferation of Internet of Things (IoT) devices, the demand for sustainable, wireless power sources has gained significant interest. Electrostatic energy harvesters (e-VEHs) present...

... Abstract Piezoelectric composite films are progressively pursued for Micro-electromechanical systems (MEMS) applications due to their adaptable nature. HD-4100 polyimide, renowned for its thermal resilience, mechanical robustness, and photopatternability, emerges as a promising matrix material...

... Abstract Microelectromechanical Systems (MEMS) packaging is over 80% of the cost of a typical MEMS device because there are no standard packaging methods, and each device requires unique packaging. Recently several MEMS devices have illustrated the desire to have a liquid filled cavity within...

... the entire membrane had the lowest displacement. In contrast, a multiple-ring configuration with the electrode rings located at a gap from the nodal circle locations gave the highest displacement and velocity. piezoelectric micromachined ultrasonic transducer MEMS nodal circles nodal diameter...

... (below 100 kHz). Keywords: Ultrasound, optical microphone, MEMS 1. INTRODUCTION Conventional laboratory style measurement microphones are problematic for gathering reliable measurements in the low ultrasonic frequency range (20 100 kHz). High frequency sensitivity is often limited by a microphone s...

... and interdigitated electrode MEMS energy harvesters using lead zirconate titanate thin films using finite element modelling and experimental results to demonstrate the increase in power density, and the effects of varying the electrode configurations and dimensions. energy harvester MEMS interdigitated...

... is an important parameter to determine the performance of the SAW device. surface acoustic wave acoustofluidics cell separation insertion loss MEMS atomizer Proceedings of the ASME 2023 International Mechanical Engineering Congress and Exposition IMECE2023 October 29-November 2, 2023, New Orleans...

... with no defects. deep reactive ion etch gas flow silicon etching MEMS microfabrication Proceedings of the ASME 2022 International Mechanical Engineering Congress and Exposition IMECE2022 October 30-November 3, 2022, Columbus, Ohio IMECE2022-92967 EFFECT OF SF6 AND C4F8 FLOW RATE ON ETCHED SURFACE...

... technologies, used to protect the MEMS energy harvesters, continue to play a key role in the development of stretchable electronics, flexible displays, and a host of other applications. Nevertheless, movable components can be exposed to cyclic loading in these applications, which can result in fatigue failure...

... Abstract Vibrational energy harvesters have significant potential to replace batteries to create self-sustaining systems able to harvest energy from the ambient environment. However, currently high Q-factor or low bandwidth is a major challenge that needs to be resolved, as typical linear MEMS...

...DSC-Vol. 66, Micro-Electro-Mechanical Systems (MEMS) 1998 ASME 1998 Multi-chamber, Real-Time DNA Analysis in the Field using Microfabricated Silicon Chambers P. Belgrader, W. Benett, R. Frattaroli, D. Hadley, R. Langlois, S. Lehew, R. Mariella Jr F. Milanovich, S. Nasarabadi, M. A. Northrup J...

... precision MEMS inertial sensor development. MEMS finite element analysis resonator resonance frequency quality factor Proceedings of the ASME 2021 International Mechanical Engineering Congress and Exposition IMECE2021 November 1-5, 2021, Virtual, Online IMECE2021-72853 Effect of manufacturing...

... Abstract Using recent advances in microelectromechanical systems (MEMS) technology, a new multivariable sensor was developed. This MEMS sensor, capable of measuring temperature, absolute pressure, and differential pressure on a single chip, is particularly suitable for applications in process...

... Abstract Advances in microelectromechanical systems (MEMS) technology are based on understanding of the issues involved in design, analysis, fabrication, characterization, and use of the finished products. Although this understanding is being developed “on the job” to satisfy immediate needs...

... MEMS bimorph effect Proceedings of 2001 ASME International Mechanical Engineering Congress and Exposition November 11-16, 2001, New York, NY MEMS-Vol. 3 IMECE2001 /MEMS-23848 A LARGE-ANGLE AND LARGE-MIRROR MICROSCANNER BASED ON THERMAL ACTUATORS Ching-Chen Tu and Cheng-Hsien Liu Micro-Systems...

... to 400 μm. deformable mirror MEMS MEMOS warpage sector structure Proceedings of 2001 ASME International Mechanical Engineering Congress and Exposition November 11-16, 2001, New York, NY MEMS-Vol. 3 IMECE2001 /MEMS-23828 DESIGN OF DEFORMABLE FOCUSING MICROMIRRORS Hanchee Yen, Chimin Lee...

...-features from the fabrication process. A demonstration to illustrate how the ‘design-to-analysis’ infrastructure is being integrated will also be presented. CAD prototyping modeling and simulation MEMS microsystem surface micromachining Proceedings of 2001 ASME International Mechanical...

... response, minimal drift, and consume 15 mW of power when operated at 3 V . They show a linear response up to 160 dB SPL and a 52 dB SPL noise floor ( 1 Hz bin centered at 1 kHz ). MEMS microphone piezoresistor noise drift Proceedings of 2001 ASME International Mechanical Engineering...

...-pump micro-fluidics MEMS microsystem Proceedings of 2001 ASME International Mechanical Engineering Congress and Exposition November 11-16,2001, New York, NY MEMS-Vol. 3 IMECE2001 /MEMS-23871 DEVELOPMENT OF AN EJECTOR-DRIVEN MICRO-VACUUM PUMP C. Channy Wong, Daniel P. Aeschliman, Jeffry J...

... Proceedings of 2001 ASME International Mechanical Engineering Congress and Exposition November 11-16, 2001, New York, NY MEMS-Vol. 3 IMECE2001 /MEMS-23833 MEMS METROLOGY USING RESONANT STRUCTURES A. Miller Allen, Department of Mechanical George C. Johnson, Department of Mechanical Engineering...