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Keywords: Electrostatic actuation
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Proceedings Papers
Proc. ASME. IMECE2020, Volume 7A: Dynamics, Vibration, and Control, V07AT07A022, November 16–19, 2020
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2020-23916
... Abstract This paper investigates the voltage-amplitude response of superharmonic resonance of fourth order of electrostatically actuated clamped MEMS circular plates. The system consists of flexible MEMS circular plate parallel to a ground plate. Hard excitations (voltage large enough) and AC...
Proceedings Papers
Proc. ASME. IMECE2020, Volume 7B: Dynamics, Vibration, and Control, V07BT07A030, November 16–19, 2020
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2020-23851
... Abstract This paper deals with voltage-amplitude response of superharmonic resonance of second order of electrostatically actuated clamped MEMS circular plates. A flexible MEMS circular plate, parallel to a ground plate, and under AC voltage, constitute the structure under consideration. Hard...
Proceedings Papers
Proc. ASME. IMECE2013, Volume 10: Micro- and Nano-Systems Engineering and Packaging, V010T11A037, November 15–21, 2013
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2013-64127
... A new valve-only micropump structure for gas applications is proposed consisting of electrostatically actuated checkerboard microvalves with dual cavities. The valve-only multistage peristaltic design minimizes complexity and footprint of the device, which allows operation at high frequency...
Proceedings Papers
Proc. ASME. IMECE2012, Volume 10: Emerging Technologies and Topics; Public Policy, 71-75, November 9–15, 2012
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2012-89285
... increases when the beam is under compression inplane loads. KEYWORDS: MEMS, movable base, pull-in voltage, Extended Kantorovich method, electrostatic actuation. INTRODUCTION Micro-electro-mechanical systems (MEMS) are used in aerospace, biomedical, automation, and many other industries. There are many...
Proceedings Papers
Proc. ASME. IMECE2012, Volume 9: Micro- and Nano-Systems Engineering and Packaging, Parts A and B, 293-300, November 9–15, 2012
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2012-87681
... of the valves significantly affects the performance of the pump. Micro pumps MEMS Electrostatic Actuation Peristaltic Valve Timing 1 Copyright © 2012 by ASME A MULTIPHYSICS REDUCED ORDER MODEL OF VALVE PUMPING IN A 4-STAGE VACUUM MICROPUMP Karthik Kumar Department of Aerospace Engineering...
Proceedings Papers
Proc. ASME. IMECE2009, Volume 12: Micro and Nano Systems, Parts A and B, 165-172, November 13–19, 2009
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2009-12186
... for design optimization. Microplate Vibration Electrostatic actuation Fundamental natural frequency 1 ASME International Mechanical Engineering Congress & Exposition November 13-19, 2009 Lake Buena Vista, Florida IMECE2009-12186 APPLICATION OF THE EXTENDED KANTOROVICH METHOD TO THE VIBRATIONAL...
Proceedings Papers
Proc. ASME. IMECE2003, Microelectromechanical Systems, 491-494, November 15–21, 2003
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2003-41528
... can be tilted in an arbitrary direction, and the fabrication process is simpler than those required to create solid torsional weak links. Micromirror Liquid metal pivot electrostatic actuation MEMS Proceedings of IMECE 03 2003 ASME International Mechanical Engineering Congress...
Topics:
Liquid metals
Proceedings Papers
Proc. ASME. IMECE2004, Fluids Engineering, 725-733, November 13–19, 2004
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2004-62042
... synthetic jet zero-net-mass-flux electrostatic actuation piezoelectric actuation electromagnetic actuation Thrust optimization of micro-synthetic pulsatile jets is studied. Cylindrical cavities with a small circular orifice at one end, and a vibrating diaphragm at the other are used...
