1-20 of 664
Microelectromechanical Systems
Close
Save search
Follow your search
Access your saved searches in your account
Would you like to receive an alert when new items match your search?
Close Modal
Sort by
Proceedings Papers

Tribology on the Macro- to Nanoscales of MEMS Materials: A Review

Available to Purchase

Bharat Bhushan
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 265-266, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-1252
https://doi.org/10.1115/IMECE1998-1252
View Paper titled, Tribology on the Macro- to Nanoscales of MEMS Materials: A Review
Open the PDF for Tribology on the Macro- to Nanoscales of MEMS Materials: A Review in another window
Topics: Microelectromechanical systems, Tribology, Friction, Silicon, Polysilicon, Microscale devices, Crystals, Wear, Boundary lubrication, Nanoindentation
Proceedings Papers

Flow Past a Micro-Sphere in a Pipe: Effects of Rarefaction

Available to Purchase

Hsin-Chih F. Liu, Ali Beskok, Nikolaos Gatsonis, George E. Karniadakis
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 445-452, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-1283
https://doi.org/10.1115/IMECE1998-1283
View Paper titled, Flow Past a Micro-Sphere in a Pipe: Effects of Rarefaction
Open the PDF for Flow Past a Micro-Sphere in a Pipe: Effects of Rarefaction in another window
Topics: Flow (Dynamics), Pipes, Knudsen number, Algorithms, Design, Drag (Fluid dynamics), Rarefied fluid dynamics, Reynolds number, Simulation, Slip flow
Proceedings Papers

MHD (Magnetohydrodynamic) Micropump Using Lorentz Force

Available to Purchase

Jaesung Jang, Seung S. Lee
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 439-444, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-1282
https://doi.org/10.1115/IMECE1998-1282
View Paper titled, MHD (Magnetohydrodynamic) Micropump Using Lorentz Force
Open the PDF for MHD (Magnetohydrodynamic) Micropump Using Lorentz Force in another window
Topics: Magnetohydrodynamics, Micropumps, Flow (Dynamics), Pressure, Electric fields, Fluids, Magnetic induction
Proceedings Papers

Contact Resistance Modeling and Measurements of an Electrostatically Actuated Micromechanical Switch

Available to Purchase

Sumit Majumder, N. E. McGruer, Paul M. Zavracky, Richard H. Morrison, George G. Adams, Jacqueline Krim
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 341-346, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-1265
https://doi.org/10.1115/IMECE1998-1265
View Paper titled, Contact Resistance Modeling and Measurements of an Electrostatically Actuated Micromechanical Switch
Open the PDF for Contact Resistance Modeling and Measurements of an Electrostatically Actuated Micromechanical Switch in another window
Topics: Contact resistance, Modeling, Switches, Gates (Closures), Cantilever beams, Coating processes, Coatings, Currents, Cycles, Electrodes
Proceedings Papers

Convection-Based Accelerometer and Tilt Sensor Implemented in Standard CMOS

Available to Purchase

Veljko Milanović, Edwin Bowen, Nim Tea, John Suehle, Beverly Payne, Mona Zaghloul, Michael Gaitan
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 487-490, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-1289
https://doi.org/10.1115/IMECE1998-1289
View Paper titled, Convection-Based Accelerometer and Tilt Sensor Implemented in Standard CMOS
Open the PDF for Convection-Based Accelerometer and Tilt Sensor Implemented in Standard CMOS in another window
Topics: Accelerometers, Complementary metal oxide semiconductors, Convection, Sensors, Temperature, Temperature sensors, Bridges (Structures), Errors, Natural convection, Thermocouples
Proceedings Papers

A High Performance Hand-Held Gas Chromatograph

Available to Purchase

Conrad M. Yu, Matthew Lucas, Jackson C. Koo, Paul Stratton, Terri DeLima, Elaine Behymer
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 481-486, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-1288
https://doi.org/10.1115/IMECE1998-1288
View Paper titled, A High Performance Hand-Held Gas Chromatograph
Open the PDF for A High Performance Hand-Held Gas Chromatograph in another window
Topics: Gas chromatography, Microelectromechanical systems, Sensors, Ejectors, Separation (Technology), Batteries, Bridges (Structures), Computer software, Electrical measurement, Electricity (Physics)
Proceedings Papers

Design and Fabrication of Piezoresistive Cantilever Microaccelerometer Arrays With a Symmetrically Bonded Proof-Mass

Available to Purchase

Jong Soo Ko, Young-Ho Cho, Byung Man Kwak, Kwanhum Park
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 353-356, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-1267
https://doi.org/10.1115/IMECE1998-1267
View Paper titled, Design and Fabrication of Piezoresistive Cantilever Microaccelerometer Arrays With a Symmetrically Bonded Proof-Mass
Open the PDF for Design and Fabrication of Piezoresistive Cantilever Microaccelerometer Arrays With a Symmetrically Bonded Proof-Mass in another window
Topics: Cantilevers, Design, Manufacturing, Accelerometers, Microfabrication, Cantilever beams, Mass production, Resonance, Sawing, Semiconductor wafers
Proceedings Papers

Design, Fabrication and Uncertainty Evaluation of a Surface-Micromachined Capacitive Microaccelerometer

Available to Purchase

Ki-Ho Han, Jong-Pal Kim, Young-Ho Cho
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 347-352, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-1266
https://doi.org/10.1115/IMECE1998-1266
View Paper titled, Design, Fabrication and Uncertainty Evaluation of a Surface-Micromachined Capacitive Microaccelerometer
Open the PDF for Design, Fabrication and Uncertainty Evaluation of a Surface-Micromachined Capacitive Microaccelerometer in another window
Topics: Design, Manufacturing, Micromachining, Uncertainty, Accelerometers, Capacitance, Electrodes, Resonance, Circuits, Engineering prototypes
Proceedings Papers

Integrated Modeling and Testing of a Micro Hinged Structure for Sliding Friction Measurement

Available to Purchase

James M. Redmond, Maarten P. de Boer, Terry A. Michalske
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 305-311, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-1259
https://doi.org/10.1115/IMECE1998-1259
View Paper titled, Integrated Modeling and Testing of a Micro Hinged Structure for Sliding Friction Measurement
Open the PDF for Integrated Modeling and Testing of a Micro Hinged Structure for Sliding Friction Measurement in another window
Topics: Modeling, Sliding friction, Testing, Friction, Design, Excitation, Bending (Stress), Computer simulation, Cycles, Deflection
Proceedings Papers

First Discrete Time Full-System Inertial Microsensor Performance Simulation Tool

Available to Purchase

Michael D. Pottenger, William J. Kaiser
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 519-524, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-1294
https://doi.org/10.1115/IMECE1998-1294
View Paper titled, First Discrete Time Full-System Inertial Microsensor Performance Simulation Tool
Open the PDF for First Discrete Time Full-System Inertial Microsensor Performance Simulation Tool in another window
Topics: Microsensors, Simulation, Resonance, Noise (Sound), Sensors, Bridges (Structures), Circuits, Complementary metal oxide semiconductors, Dynamics (Mechanics), Feedback
Proceedings Papers

Liquid Mass Flow Sensor Using Dynamic Pressure Detection

Available to Purchase

M. Ashauer, H. Glosch, H. Ashauer, H. Sandmaier, W. Lang
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 421-425, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-1279
https://doi.org/10.1115/IMECE1998-1279
View Paper titled, Liquid Mass Flow Sensor Using Dynamic Pressure Detection
Open the PDF for Liquid Mass Flow Sensor Using Dynamic Pressure Detection in another window
Topics: Flow sensors, Pressure, Sensors, Dimensions, Engineering prototypes, Flow (Dynamics), Pressure sensors, Silicon
Proceedings Papers

Influence of Fabrication and Crystal Orientation on the Strength of Silicon Microridges

Available to Purchase

Quanfang Chen, Da-Jeng Yao, Chang-Jin “CJ” Kim, Greg P. Carman
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 413-420, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-1278
https://doi.org/10.1115/IMECE1998-1278
View Paper titled, Influence of Fabrication and Crystal Orientation on the Strength of Silicon Microridges
Open the PDF for Influence of Fabrication and Crystal Orientation on the Strength of Silicon Microridges in another window
Topics: Crystal structure, Manufacturing, Silicon, Chemical etching, Crystals, Reactive-ion etching, Dry etching, Anisotropy, Shear (Mechanics), Shear strength
Proceedings Papers

Micromachine Wedge Stepping Motor

Available to Purchase

James J. Allen, Heather K. Schriner
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 317-322, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-1261
https://doi.org/10.1115/IMECE1998-1261
View Paper titled, Micromachine Wedge Stepping Motor
Open the PDF for Micromachine Wedge Stepping Motor in another window
Topics: Stepper motors, Wedges, Signals, Design, Gear teeth, Manufacturing, Testing, Torque
Proceedings Papers

Computer-Aided Micro-Mechanism Design

Available to Purchase

Elisha Sacks, James Allen
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 313-316, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-1260
https://doi.org/10.1115/IMECE1998-1260
View Paper titled, Computer-Aided Micro-Mechanism Design
Open the PDF for Computer-Aided Micro-Mechanism Design in another window
Topics: Computer-aided engineering, Design, Micromechanical devices, Computer software, Kinematics, Space, Computer-aided design, Gears, Geometry, Micromachining
Proceedings Papers

Suspended Moving Channels and Channel Actuators for Microfluidic Applications

Available to Purchase

John M. Chong, Noel C. MacDonald
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 433-438, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-1281
https://doi.org/10.1115/IMECE1998-1281
View Paper titled, Suspended Moving Channels and Channel Actuators for Microfluidic Applications
Open the PDF for Suspended Moving Channels and Channel Actuators for Microfluidic Applications in another window
Topics: Actuators, Microfluidics, Fluids, Chemical reactions, Crystals, Density, Design, Excitation, Metals, Resonance
Proceedings Papers

Thermal Flow Sensor for Liquids and Gases

Available to Purchase

M. Ashauer, H. Glosch, F. Hedrich, N. Hey, H. Sandmaier, W. Lang
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 427-432, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-1280
https://doi.org/10.1115/IMECE1998-1280
View Paper titled, Thermal Flow Sensor for Liquids and Gases
Open the PDF for Thermal Flow Sensor for Liquids and Gases in another window
Topics: Flow sensors, Gases, Pollution, Sensors
Proceedings Papers

Fabrication of 109.5° Micro V-Grooves Using a Two-Step Anisotropic Etching Technique

Available to Purchase

Wen-Tien Chang Chien, Liwei Lin, Yi-Chung Lo, Chia-Ou Chang
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 361-364, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-1269
https://doi.org/10.1115/IMECE1998-1269
View Paper titled, Fabrication of 109.5° Micro V-Grooves Using a Two-Step Anisotropic Etching Technique
Open the PDF for Fabrication of 109.5° Micro V-Grooves Using a Two-Step Anisotropic Etching Technique in another window
Topics: Anisotropy, Etching, Manufacturing, Shapes, Design, Microelectromechanical systems, Semiconductor wafers
Proceedings Papers

Design and Strength Evaluation of an Anodically Bonded Pressurized Cavity Array for Wafer-Level MEMS Packaging

Available to Purchase

Jeung Sang Go, Young-Ho Cho
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 357-360, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-1268
https://doi.org/10.1115/IMECE1998-1268
View Paper titled, Design and Strength Evaluation of an Anodically Bonded Pressurized Cavity Array for Wafer-Level MEMS Packaging
Open the PDF for Design and Strength Evaluation of an Anodically Bonded Pressurized Cavity Array for Wafer-Level MEMS Packaging in another window
Topics: Cavities, Design, MEMS packaging, Semiconductor wafers, Bonding, Plates (structures), Pressure, Design methodology, Failure, Finite element analysis
Proceedings Papers

An 8x8 Robust Capacitive Pressure Sensor Array

Available to Purchase

Sung-Pil Chang, Jeong-Bong Lee, Mark G. Allen
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 513-517, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-1293
https://doi.org/10.1115/IMECE1998-1293
View Paper titled, An 8x8 Robust Capacitive Pressure Sensor Array
Open the PDF for An 8x8 Robust Capacitive Pressure Sensor Array in another window
Topics: Pressure sensors, Micromachining, Sensors, Manufacturing, Stainless steel, Capacitance, Design, Electrodes, Flow (Dynamics), Lamination
Proceedings Papers

Design, Fabrication and Optical Characterization of Micro Fresnel Zone Plates

Available to Purchase

Wen-Hong Lee, Liwei Lin
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 505-511, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-1292
https://doi.org/10.1115/IMECE1998-1292
View Paper titled, Design, Fabrication and Optical Characterization of Micro Fresnel Zone Plates
Open the PDF for Design, Fabrication and Optical Characterization of Micro Fresnel Zone Plates in another window
Topics: Design, Manufacturing, Plates (structures), Gamma rays, Glass, Helium-neon lasers, Image formation, Infrared radiation, Membranes, Stress